JOURNAL ARTICLE
Silicon nitride and oxynitride films
F.H.P.M. HabrakenA. E. T. Kuiper
Year: 1994 Journal: Materials Science and Engineering R Reports Vol: 12 (3)Pages: 123-175 Publisher: Elsevier BV
Keywords:
Silicon oxynitride Materials science Chemical vapor deposition Amorphous solid Nitride Diffusion Silicon Reactivity (psychology) Nanotechnology Thin film Silicon nitride Characterization (materials science) Chemical engineering Chemistry Optoelectronics Crystallography Layer (electronics) Physics
Metrics
161
Cited By
6.67
FWCI (Field Weighted Citation Impact)
252
Refs
0.98
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
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