Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser

Abstract

Hierarchical micro-nano structure surface on silicon is directly produced by femtosecond laser in air. The laser processing reduces the reflectance of silicon significantly in the studied wavelength range (0.25-1.1 μm). Mechanical durability of the micro-nano structure surface has been studied. It is indicated that wear is significantly reduced under water saturation lubrication. Moreover surface modification with Perfluoropolyether improves its mechanical durability.