Characterization of Static Behavior of Electrostatically Actuated Micro Tweezers Using Modified Couple Stress Theory

Abstract

In this paper, static behavior and pull-in of micro tweezers is studied. The micro tweezer is modelled as two cantilever beams. Static behavior of the micro tweezer under the effect of electrostatic actuation is modelled using the Euler-Bernoulli beam theory. In order to capture size effects on the behavior of micro tweezers, modified couple stress theory is utilized. It is shown when the voltage between two electrodes increased from some specific value, micro beams adhere to each other and it is observed that the pull-in voltage predicted by the modified couple stress theory considerably differs with that of the classical theory of elasticity. Results of this paper can be used for accurate design, synthesis and optimization of micro tweezers.