Wafer-scale flexible graphene loudspeakers

Abstract

In this paper, wafer-scale flexible graphene loudspeakers are fabricated in one-step laser scribing technology. Current fabrication process for graphene devices is mainly based on chemical vapor deposition graphene, which needs several hours' graphene growth, transfer and patterning. By using this new laser scribing technology, wafer-scale graphene patterns can be obtained in 25 minutes with low cost. The flexible graphene loudspeaker is demonstrated to be high performance with wide-band sound generation from 1∼50 kHz, which indicated that the laser scribed graphene could be widely used in integrating wafer-scale graphene-based acoustic devices.