Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: a transparent and conductive platform for microdevices

S. Beke; László Kőrösi; Koji Sugioka; Katsumi Midorikawa; Imre Dékány

doi:10.1007/s00339-010-6173-3

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Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: a transparent and conductive platform for microdevices

S. Beke László Kőrösi Koji Sugioka Katsumi Midorikawa Imre Dékány

Year: 2011 Journal: Applied Physics A Vol: 102 (2)Pages: 265-269 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-010-6173-3

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Keywords:

Indium tin oxide Electrical conductor Transparent conducting film Indium Materials science Optoelectronics Tin Nanotechnology Electrically conductive Tin oxide Oxide Thin film Composite material Metallurgy

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanomaterials and Printing Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electrowetting and Microfluidic Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: a transparent and conductive platform for microdevices

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