X-Ray Diffraction Microstructural Characterization of PZT (Pb(Zr&lt;sub&gt;x&lt;/sub&gt;Ti&lt;sub&gt;1-x&lt;/sub&gt;)O&lt;sub&gt;3&lt;/sub&gt; and Pt Thin Films on TiN/Ti/BPSG/Si Structures

Françoise Varnière; B. Ea Kim; R. Bisaro; G. Chevrier

doi:10.4028/www.scientific.net/msf.228-231.487

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X-Ray Diffraction Microstructural Characterization of PZT (Pb(ZrxTi1-x)O3 and Pt Thin Films on TiN/Ti/BPSG/Si Structures

Françoise Varnière B. Ea Kim R. Bisaro G. Chevrier

Year: 1996 Journal: Materials science forum Vol: 228-231 Pages: 487-492 Publisher: Trans Tech Publications

DOI: 10.4028/www.scientific.net/msf.228-231.487

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Keywords:

Materials science X-ray crystallography Characterization (materials science) Diffraction X-ray Crystallography Microstructure Analytical Chemistry (journal) Metallurgy Nanotechnology Optics Physics Chemistry

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

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X-Ray Diffraction Microstructural Characterization of PZT (Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub> and Pt Thin Films on TiN/Ti/BPSG/Si Structures

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