Highly sensitive SnO2 porous film gas sensors fabricated by plasma spray physical vapor deposition

Kazuyuki Iizuka; Makoto Kambara; Toyonobu Yoshida

doi:10.1016/j.snb.2012.07.060

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JOURNAL ARTICLE

Highly sensitive SnO2 porous film gas sensors fabricated by plasma spray physical vapor deposition

Kazuyuki Iizuka Makoto Kambara Toyonobu Yoshida

Year: 2012 Journal: Sensors and Actuators B Chemical Vol: 173 Pages: 455-461 Publisher: Elsevier BV

DOI: 10.1016/j.snb.2012.07.060

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Keywords:

Electrode Materials science Deposition (geology) Porosity Diffusion Permeation Water vapor Analytical Chemistry (journal) Physical vapor deposition Gaseous diffusion Thin film Optoelectronics Composite material Nanotechnology Chemistry Membrane Thermodynamics

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Chemical Sensor Technologies

Physical Sciences → Engineering → Biomedical Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Highly sensitive SnO2 porous film gas sensors fabricated by plasma spray physical vapor deposition

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