Perfluoroelastomer and fluoroelastomer seals for semiconductor wafer processing equipment

Shuhong Wang; John M. Legare

doi:10.1016/s0022-1139(03)00102-7

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Perfluoroelastomer and fluoroelastomer seals for semiconductor wafer processing equipment

Shuhong Wang John M. Legare

Year: 2003 Journal: Journal of Fluorine Chemistry Vol: 122 (1)Pages: 113-119 Publisher: Elsevier BV

DOI: 10.1016/s0022-1139(03)00102-7

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Keywords:

Wafer Elastomer Rapid thermal processing Semiconductor Stripping (fiber) Plating (geology) Materials science Chemical resistance Etching (microfabrication) Chemistry Nanotechnology Composite material Optoelectronics

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Silicone and Siloxane Chemistry

Physical Sciences → Materials Science → Materials Chemistry

Tribology and Wear Analysis

Physical Sciences → Engineering → Mechanics of Materials

Polymer Nanocomposites and Properties

Physical Sciences → Materials Science → Polymers and Plastics

Perfluoroelastomer and fluoroelastomer seals for semiconductor wafer processing equipment

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