JOURNAL ARTICLE

Perfluoroelastomer and fluoroelastomer seals for semiconductor wafer processing equipment

Shuhong WangJohn M. Legare

Year: 2003 Journal:   Journal of Fluorine Chemistry Vol: 122 (1)Pages: 113-119   Publisher: Elsevier BV
Keywords:
Wafer Elastomer Rapid thermal processing Semiconductor Stripping (fiber) Plating (geology) Materials science Chemical resistance Etching (microfabrication) Chemistry Nanotechnology Composite material Optoelectronics

Metrics

37
Cited By
0.61
FWCI (Field Weighted Citation Impact)
2
Refs
0.66
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Silicone and Siloxane Chemistry
Physical Sciences →  Materials Science →  Materials Chemistry
Tribology and Wear Analysis
Physical Sciences →  Engineering →  Mechanics of Materials
Polymer Nanocomposites and Properties
Physical Sciences →  Materials Science →  Polymers and Plastics

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