Energy harvesting MEMS device based on thin film piezoelectric cantilevers

Wonjae Choi; Young-Jun Jeon; Jaehwa Jeong; R. Sood; S. G. Kim

doi:10.1007/s10832-006-6287-3

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Energy harvesting MEMS device based on thin film piezoelectric cantilevers

Wonjae Choi Young-Jun Jeon Jaehwa Jeong R. Sood S. G. Kim

Year: 2006 Journal: Journal of Electroceramics Vol: 17 (2-4)Pages: 543-548 Publisher: Springer Science+Business Media

DOI: 10.1007/s10832-006-6287-3

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Keywords:

Materials science Cantilever Lead zirconate titanate Energy harvesting Proof mass Piezoelectricity Bimorph Microelectromechanical systems Optoelectronics Mechanical energy Thin film Resistive touchscreen Nanogenerator Vibration Electric potential energy Piezoelectric coefficient Acoustics Power (physics) Electrical engineering Composite material Nanotechnology Ferroelectricity

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Innovative Energy Harvesting Technologies

Physical Sciences → Engineering → Mechanical Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Smart Materials for Construction

Physical Sciences → Environmental Science → Pollution

Energy harvesting MEMS device based on thin film piezoelectric cantilevers

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