Large area diamond films growth in multi-filament chemical vapor deposition

Jie Yu; Rongfang Huang; Lishi Wen; Changxu Shi

doi:10.1016/s0921-5107(98)00426-7

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Large area diamond films growth in multi-filament chemical vapor deposition

Jie Yu Rongfang Huang Lishi Wen Changxu Shi

Year: 1999 Journal: Materials Science and Engineering B Vol: 57 (3)Pages: 255-258 Publisher: Elsevier BV

DOI: 10.1016/s0921-5107(98)00426-7

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Keywords:

Chemical vapor deposition Diamond Wafer Scanning electron microscope Materials science Raman spectroscopy Substrate (aquarium) Deposition (geology) Volumetric flow rate Thin film Analytical Chemistry (journal) Composite material Nanotechnology Optics Chemistry Geology

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Large area diamond films growth in multi-filament chemical vapor deposition

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