Fabrication and characterization of two-dimensional photonic crystal using holographic lithography technology

Abstract

We propose and demonstrate a holographic system using three beams to generate periodic patterns for fabricating photonic crystals.By properly adjusting the incident angle and intensity of three laser beams, the period and structure of interference pattern can be modified.Computer simulation results will be presented and optical holographic system will be constructed.In addition, a simple optical inspection method for real-time examining the structure of photonic crystal will be developed.Optical experimental result will be demonstrated and discussed in this paper.