JOURNAL ARTICLE
Composition Deviation in Nb3Al Thin Films Sputter-Deposited at High Substrate Temperatures
Year: 1982 Journal: Japanese Journal of Applied Physics Vol: 21 (5R)Pages: 801-801 Publisher: Institute of Physics
Keywords:
Sputtering Substrate (aquarium) Materials science Thin film Composition (language) Chemical composition Sputter deposition Analytical Chemistry (journal) Chemical engineering Nanotechnology Chemistry Geology Environmental chemistry Art
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4
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0.71
FWCI (Field Weighted Citation Impact)
4
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0.70
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Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Particle accelerators and beam dynamics
Physical Sciences → Engineering → Aerospace Engineering
Superconducting Materials and Applications
Physical Sciences → Engineering → Biomedical Engineering
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