TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer

Changzheng Wei; Wei Zhou; Quan Wang; Xiaoyuan Xia; Xinxin Li

doi:10.1016/j.mee.2011.10.001

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TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer

Changzheng Wei Wei Zhou Quan Wang Xiaoyuan Xia Xinxin Li

Year: 2011 Journal: Microelectronic Engineering Vol: 91 Pages: 167-173 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2011.10.001

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Keywords:

Piezoresistive effect Accelerometer Surface micromachining Pressure sensor Materials science Microelectromechanical systems Electroplating Sensitivity (control systems) Diaphragm (acoustics) Bulk micromachining Optoelectronics Chip Acoustics Electronic engineering Electrical engineering Nanotechnology Fabrication Computer science Engineering Vibration Mechanical engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer

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