S. AlexandrovaP. DaneshI. A. Maslyanitsyn
The first application of the second harmonic generation (SHG) technique to investigate the structure of $a\ensuremath{-}\mathrm{S}\mathrm{i}:\mathrm{H}$ films is reported. Dependence of SHG on the type of substrate material and the temperature during deposition has been observed. The origin of SHG is discussed. A stress model is proposed to explain the experimental results. It is suggested that the second harmonic is generated in a strained layer close to the substrate.
J. EbothéI.V. KitykPere Roca i CabarrocasC. GodetB. Equer
S. LettieriFrancesco MerolaP. MaddalenaCarlo RicciardiFabrizio Giorgis
Long HeJames D. WalkerHoward M. BranzCharles T. RogersCharles W. Teplin
W. M. M. KesselsJ. J. H. GielisI. M. P. AartsC.M. LeewisM. C. M. van de Sanden
I. M. P. AartsJ. J. H. GielisM. C. M. van de SandenW. M. M. Kessels