Electrical and optical properties of amorphous indium zinc oxide films

Norihiro Ito; Yasushi Sato; Pung Keun Song; A. Kaijio; Kazuyoshi Inoue; Yuzo Shigesato

doi:10.1016/j.tsf.2005.08.257

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Electrical and optical properties of amorphous indium zinc oxide films

Norihiro Ito Yasushi Sato Pung Keun Song A. Kaijio Kazuyoshi Inoue Yuzo Shigesato

Year: 2005 Journal: Thin Solid Films Vol: 496 (1)Pages: 99-103 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2005.08.257

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Keywords:

Materials science Amorphous solid Sputter deposition Indium Band gap Analytical Chemistry (journal) Electrical resistivity and conductivity Impurity Sputtering Substrate (aquarium) Oxide Ceramic Thin film Inorganic chemistry Optoelectronics Metallurgy Nanotechnology Chemistry Crystallography

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Electrical and optical properties of amorphous indium zinc oxide films

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