JOURNAL ARTICLE

Electrical and optical experimental study of ionized physical vapour deposition (IPVD) processes

Ludovic de PoucquesJean-Christophe ImbertC. Boisse-LaporteJ. BretagneM. GanciuL. Teul’-GayM. Touzeau

Year: 2006 Journal:   Czechoslovak Journal of Physics Vol: 56 (S2)Pages: B1300-B1313   Publisher: Springer Science+Business Media
Keywords:
Ambipolar diffusion Langmuir probe Materials science Spectroscopy Plasma Argon Ionization Atomic physics Absorption spectroscopy Absorption (acoustics) Ion Diffusion Pulsed DC Titanium Sputter deposition Plasma diagnostics Cavity magnetron Sputtering Analytical Chemistry (journal) Thin film Optics Chemistry Physics Nanotechnology

Metrics

2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
23
Refs
0.12
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
Plasma Diagnostics and Applications
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

Related Documents

BOOK-CHAPTER

Ionized Physical Vapor Deposition (IPVD)

Year: 2013 Pages: 1866-1866
JOURNAL ARTICLE

Ionized physical vapor deposition (IPVD): magnetron sputtering discharges

Jón Tómas Guðmundsson

Journal:   Journal of Physics Conference Series Year: 2008 Vol: 100 (8)Pages: 082002-082002
JOURNAL ARTICLE

Sources of azimuthal asymmetries in ionized metal physical vapour deposition processes

Junqing LuMark J. Kushner

Journal:   Plasma Sources Science and Technology Year: 2001 Vol: 10 (3)Pages: 502-512
JOURNAL ARTICLE

Physical vapour deposition processes

D.H. Boone

Journal:   Materials Science and Technology Year: 1986 Vol: 2 (3)Pages: 220-224
JOURNAL ARTICLE

Physical vapour deposition processes

D.H. Boone

Journal:   Materials Science and Technology Year: 1986 Vol: 2 (3)Pages: 220-224
© 2026 ScienceGate Book Chapters — All rights reserved.