A free-hanging strain-gauge for ultraminiaturized pressure sensors

Patrik Melvås; Edvard Kälvesten; Peter Enoksson; Göran Stemme

doi:10.1016/s0924-4247(01)00798-1

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A free-hanging strain-gauge for ultraminiaturized pressure sensors

Patrik Melvås Edvard Kälvesten Peter Enoksson Göran Stemme

Year: 2002 Journal: Sensors and Actuators A Physical Vol: 97-98 Pages: 75-82 Publisher: Elsevier BV

DOI: 10.1016/s0924-4247(01)00798-1

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Keywords:

Strain gauge Diaphragm (acoustics) Pressure sensor Materials science Beam (structure) Sensitivity (control systems) Optics Pressure measurement Gauge (firearms) Enhanced Data Rates for GSM Evolution Strain (injury) Chip Acoustics Optoelectronics Composite material Electrical engineering Vibration Physics Engineering Mechanical engineering Electronic engineering Telecommunications

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

A free-hanging strain-gauge for ultraminiaturized pressure sensors

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