Porous silicon based resonant grating filters for biochemical sensing applications

Abstract

Porous silicon has attracted a great deal of attention and research for biochemical sensing applications. In this study, we report a novel porous silicon based resonant grating filters as an optical sensor platform. A narrow bandwidth in the reflectance spectrum is shown of this porous silicon grating filters and this resonance dip shift obviously after little infiltration. This research also played a potential role for the extensive applications in all-silicon biosensor.