Electrostatically Actuated Coupled MEMS Resonators

Abstract

This paper deals with the nonlinear response of an electrostatically actuated cantilever beam system composed of two micro beam resonators near natural frequency. The mathematical model of the system is obtained using Lagrange equations. The equations of motion are nondimensionalized and then the method of multiple scales is used to find steady state solutions. Both AC and DC actuation voltages of the first beam are considered, while the influence on the system of DC on the second beam is explored. Graphical representations of the influence of the detuning parameters are provided for a typical micro beam system structure.