S. OhkijimaShuji YamamotoK. OuchiY. Nakamura
A new sputtering source (named an SPT target) was modified so as to enable high-rate deposition and continuous fabrication of Co-Cr composite perpendicular recording media. In order to improve the orientation and crystallinity of the Co-Cr layer and the permalloy backlayer, the aperture position was optimized and a magnetic return path plate was added to the target. The Co-Cr tape medium deposited on a 9 m thick polyimide film using this modified sputtering source showed good high-density recording performance.
S. OhkijimaShunya YamamotoK. OuchiY. Nakamura
Setsuo YamamotoH. MuraokaIsao WatanabeYoshihisa NakamuraK. Ouchi
Hiromasa YoshimotoK. KugaEiichi MiyashitaNaoto HayashiTsuneyoshi NakayamaY. YonedaJunji Numazawa