Effect of Collection Distance on the Lattice Structure of Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition

Abstract

Anatase titania nanoparticles are prepared at 700°C by metalorganic chemical vapor deposition (MOCVD) and the nanoparticles are collected by thermophoretic collection method. The effect of collection distance on the lattice structure of the nanoparticles is investigated, followed by discussion. The results show that the collection distance exerts a significant influence on the lattice structure of the nanoparticles. With decreasing collection distance, the lattice constant a increases while c decreases simultaneously, resulting in more significant lattice distortion. X-ray photoelectron spectroscopy and electron paramagnetic resonance results show that both oxygen and titanium vacancies exist in the nanoparticles. Vacancies in the nanoparticles are responsible for the lattice distortion.