rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications

Vinh Ai Dao; Hyung Wook Choi; Jongkyu Heo; Hyeongsik Park; Kichan Yoon; Youngseok Lee; Yongkuk Kim; N. Lakshminarayan; Junsin Yi

doi:10.1016/j.cap.2010.02.019

JOURNAL ARTICLE

rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications

Vinh Ai Dao Hyung Wook Choi Jongkyu Heo Hyeongsik Park Kichan Yoon Youngseok Lee Yongkuk Kim N. Lakshminarayan Junsin Yi

Year: 2010 Journal: Current Applied Physics Vol: 10 (3)Pages: S506-S509 Publisher: Elsevier BV

DOI: 10.1016/j.cap.2010.02.019

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Keywords:

Materials science Optoelectronics Heterojunction Indium tin oxide Substrate (aquarium) Sputter deposition Figure of merit Solar cell Cavity magnetron Thin film Layer (electronics) Electrical resistivity and conductivity Sputtering Nanotechnology Electrical engineering

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications

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