Fabrication of water-cooled laser silicon mirror by direct laser sintering

Abstract

Coppery heat sink with micro pores and Sub-millimeter channel has been fabricated by direct laser sintering on the back of the silicon mirror. To verify the heat dissipation capability of the fabricated heat sink, a Twyman-Green interferometer was employed to measure the thermal deformation of the silicon mirror radiated by a high power laser. It is shown that the thermal deformation of the mirror increases with the irradiating time and laser intensity. The heat balance can be achieved after several seconds of laser irradiation even when the net absorbed laser power density is up to 5.3 × 10(5) W/m(2). The time for reaching the heat balance also increases with the laser intensity. The maximum thermal deformation of the mirror is 0.65 µm if the net absorbed laser power density is 5.3 × 10(5) W/m(2).