JOURNAL ARTICLE
An indirectly clamped capacitive micromachined ultrasonic transducer with a high electromechanical coupling factor
Dong Kyun KimSeok-Whan ChungByung-Gil JeongSeogwoo HongHyung-Jae Shin
Year: 2013 Journal: Sensors and Actuators A Physical Vol: 203 Pages: 82-91 Publisher: Elsevier BV
Keywords:
Capacitive micromachined ultrasonic transducers Materials science Ultrasonic sensor Diaphragm (acoustics) Acoustics Deflection (physics) Capacitive sensing Transducer Coupling (piping) Optics Piezoelectricity Composite material Electrical engineering Engineering Vibration
Metrics
7
Cited By
0.26
FWCI (Field Weighted Citation Impact)
32
Refs
0.63
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Ultrasound Imaging and Elastography
Health Sciences → Medicine → Radiology, Nuclear Medicine and Imaging
Acoustic Wave Phenomena Research
Physical Sciences → Engineering → Biomedical Engineering
Aeroelasticity and Vibration Control
Physical Sciences → Engineering → Aerospace Engineering
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