Femtosecond pulsed laser ablation of diamond-like carbon films on silicon

Yunyun Dong; H. Sakata; Pal Molian

doi:10.1016/j.apsusc.2005.01.008

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Femtosecond pulsed laser ablation of diamond-like carbon films on silicon

Yunyun Dong H. Sakata Pal Molian

Year: 2005 Journal: Applied Surface Science Vol: 252 (2)Pages: 352-357 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2005.01.008

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Keywords:

Ablation Materials science Femtosecond Silicon Laser Picosecond Laser ablation Diamond Pulsed laser deposition Optoelectronics Scanning electron microscope Optics Thin film Nanotechnology Composite material

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Femtosecond pulsed laser ablation of diamond-like carbon films on silicon

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