JOURNAL ARTICLE

Epitaxial growth of thin Ag and Au films on Si(111) using thin copper silicide buffer layers

Kjeld PedersenPer MorgenThomas Garm PedersenZheshen LiSøren Vrønning Hoffmann

Year: 2003 Journal:   Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Vol: 21 (4)Pages: 1431-1435   Publisher: American Institute of Physics

Abstract

Synchrotron radiation photoemission experiments show that a thin copper silicide layer formed by depositing the equivalent of six layers of Cu on Si(111) serves as an excellent buffer for additional growth of Ag and Au overlayers. Introduction of this buffer below a Ag film leads to enhanced quantization effects in the valence band spectra and the appearance of a Ag(111) surface state. Without the buffer layers this surface state shifts above the Fermi level due to strain in the film. Strong coupling is observed between the quantized Ag sp band and the Cu d band but the coupling to the Cu sp band found for Ag on bulk Cu is absent. In the case of Au overlayers the copper silicide layer prevents the reaction between Si and Au that otherwise results in the formation of a reacted layer on top of the Au film. Introduction of the buffer layer leads to Au film properties characteristic of the (111) surface such as a surface component in the core level spectra and a surface state just below the Fermi level.

Keywords:
Materials science Silicide Copper Epitaxy Thin film Fermi level Layer (electronics) Analytical Chemistry (journal) X-ray photoelectron spectroscopy Synchrotron radiation Overlayer Crystallography Condensed matter physics Metallurgy Chemistry Nanotechnology Optics Chemical engineering Electron

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7
Cited By
0.69
FWCI (Field Weighted Citation Impact)
22
Refs
0.69
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Citation History

Topics

Surface and Thin Film Phenomena
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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