JOURNAL ARTICLE

Fabrication for metal photomask pattern by using fountain-pen nanolithography

Miki OnoueHirobumi Ushijima

Year: 2009 Journal:   Microelectronic Engineering Vol: 87 (5-8)Pages: 910-913   Publisher: Elsevier BV
Keywords:
Photomask Nanolithography Fountain Fabrication Dip-pen nanolithography Nanotechnology Materials science Lithography Metal Optoelectronics Resist Metallurgy Art Visual arts

Metrics

9
Cited By
0.89
FWCI (Field Weighted Citation Impact)
5
Refs
0.75
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics

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