Nanolithography with atom optics

V. I. Balykin; Pavel N. Melentiev

doi:10.1134/s1995078009070040

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JOURNAL ARTICLE

Nanolithography with atom optics

V. I. Balykin Pavel N. Melentiev

Year: 2009 Journal: Nanotechnologies in Russia Vol: 4 (7-8)Pages: 425-447 Publisher: Springer Science+Business Media

DOI: 10.1134/s1995078009070040

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Abstract

We review the main results obtained in fast-growing new type of particle optics—atom optics and one of its practical applications—atom nanolithography. Basic methods for creating elements of atom optics are considered. Main achievements of atom nanolithography are presented with discussion for atom nanolithography perspectives.

Keywords:

Nanolithography Atom (system on chip) Atom optics Materials science Nanotechnology Optics Physics Computer science Fabrication

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Topics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Near-Field Optical Microscopy

Physical Sciences → Engineering → Biomedical Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Nanolithography with atom optics

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