JOURNAL ARTICLE
The Characteristics of MEMS Based Seismic Sensors Using the Electrochemical Approach
Yun FanJun Bo WangTao DengDe Yong ChenWen He
Year: 2013 Journal: Key engineering materials Vol: 562-565 Pages: 486-489 Publisher: Trans Tech Publications
Abstract
The characteristics of MEMS based electrochemical seismic sensors (EC seismic sensors) are presented in this paper. A numerical model is set up, and a series of vibration test is established. The numerical simulation and vibration test results are illustrated and the difference between them is discussed.
Keywords:
Microelectromechanical systems Vibration Structural engineering Set (abstract data type) Electrochemistry Materials science Series (stratigraphy) Computer simulation Acoustics Engineering Computer science Mechanical engineering Geology Simulation Electrode Physics Nanotechnology
Metrics
4
Cited By
1.11
FWCI (Field Weighted Citation Impact)
9
Refs
0.80
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Geophysics and Sensor Technology
Physical Sciences → Engineering → Ocean Engineering
Advanced Fiber Optic Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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