Fabrication of a MEMS deformable mirror for adaptive optics

Abstract

A novel micro-deformable mirror with continuous facet is designed and fabricated in this paper. It consists of 49 electrostatically driven actuators, and its effective reflective surface is 900 millimeter square, which is a significant feature over other existed mirrors. Some processes are discussed in detail for mirror fabrication, in which a convex compensation method is designed for the anisotropic etching and a special structure is also used to improve the quality of anodic bonding.