Capacitive displacement transducers with high accuracy and resolution

Abstract

Capacitive displacement transducers can be a particularly accurate and sensitive means of measuring displacement over a wide range. They are equivalent to an almost perfect potential divider and when used with inductive ratio arms accuracies to 1 in 106 can be achieved. Resolution of better than 1 in 107 is possible and apart from environmental and structural stability a displacement of less than 40 Å can be observed.