Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching

R. Srinivasan

doi:10.1016/0032-3861(82)90206-3

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Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching

R. Srinivasan

Year: 1982 Journal: Polymer Vol: 23 (13)Pages: 1863-1864 Publisher: Elsevier BV

DOI: 10.1016/0032-3861(82)90206-3

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Keywords:

Ethylene Ultraviolet Materials science Poly ethylene Etching (microfabrication) Ultraviolet radiation Radiation Irradiation Polymer chemistry Photochemistry Chemical engineering Optoelectronics Composite material Chemistry Optics Organic chemistry Radiochemistry Physics Catalysis

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Polymer crystallization and properties

Physical Sciences → Materials Science → Polymers and Plastics

Synthesis and properties of polymers

Physical Sciences → Materials Science → Polymers and Plastics

Photopolymerization techniques and applications

Physical Sciences → Chemistry → Organic Chemistry

Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching

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