Design, fabrication, and characterization of Si-based ARROW photonic crystal waveguides

Jianhua Chen; Yu-Lin Yang; Ming-Feng Lu; Yang-Tung Huang; Jia‐Min Shieh

doi:10.1109/iqec-cleo.2011.6194071

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JOURNAL ARTICLE

Design, fabrication, and characterization of Si-based ARROW photonic crystal waveguides

Jianhua Chen Yu-Lin Yang Ming-Feng Lu Yang-Tung Huang Jia‐Min Shieh

Year: 2011 Pages: 162-164

DOI: 10.1109/iqec-cleo.2011.6194071

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Abstract

Si-based ARROW PCWs were first successfully fabricated. For the preliminary experiments, the losses about 5 dB/mm or even lower with a long length of 800-μm were achieved. Design, fabrication, and characterization of the devices will be presented.

Keywords:

Fabrication Characterization (materials science) Photonic crystal Materials science Optoelectronics Photonics Arrow Optics Nanotechnology Computer science Physics

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Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Design, fabrication, and characterization of Si-based ARROW photonic crystal waveguides

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