JOURNAL ARTICLE
“Laser cleaning” removes particles from surfaces
Werner ZapkaW. ZiemlichW. P. LeungA. C. Tam
Year: 1993 Journal: Microelectronic Engineering Vol: 20 (1-2)Pages: 171-183 Publisher: Elsevier BV
Keywords:
Laser Silicon Materials science Particle (ecology) Contamination Dry cleaning Optoelectronics Optics Waste management
Metrics
49
Cited By
1.96
FWCI (Field Weighted Citation Impact)
8
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
Thermography and Photoacoustic Techniques
Physical Sciences → Engineering → Mechanics of Materials
Ocular and Laser Science Research
Health Sciences → Medicine → Ophthalmology
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