Sensing using nanostructured metal oxide thin films

Abstract

Metal oxides gas sensing properties particularly for In₂O₃ and ZnO nanostructures and nanostructured thin films are reviewed. Fabrication methods for these most commonly used metal oxides are presented, followed by a study on how growth techniques lead to nanostructures and nanostructured polycrystalline films with surface features of nanometer scale for film thickness bellow 1μm. The study continues with a discussion on how, a broad range of morphological parameters, affect the thin film response to various gases. After an overview, the study focus on thin films prepared by reactive dc magnetron sputtering and pulsed laser deposition in different growth conditions. In₂O₃ and ZnO thin films prepared for ozone sensing exhibit resistivity changes of five to eight orders of magnitude at room temperature after exposure to UV light and subsequent ozone treatment. Structural properties, i.e., crystallinity and microstructure investigated by X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) are studied. The nanostructure and nanostructured surfaces are highly controlled by the deposition parameters, which, control the transport properties, and thus the sensing characteristics as measured by conductometric techniques. Analyses on the sensing response of nanostructures and nanostructured In₂O₃ and ZnO films for different gases are presented. Experiments on Surface Acoustic Wave (SAW) devices based on In₂O₃ and ZnO thin films fabricated on LiNbO3 substrates indicate the capability of achieving sensing levels in the low ppb range.