Oxidation behavior of Ti–B–C–N coatings deposited by reactive magnetron sputtering

Xiangyang Chen; Sheng-li Ma; Kewei Xu; Paul K. Chu

doi:10.1016/j.vacuum.2012.03.001

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JOURNAL ARTICLE

Oxidation behavior of Ti–B–C–N coatings deposited by reactive magnetron sputtering

Xiangyang Chen Sheng-li Ma Kewei Xu Paul K. Chu

Year: 2012 Journal: Vacuum Vol: 86 (10)Pages: 1505-1512 Publisher: Elsevier BV

DOI: 10.1016/j.vacuum.2012.03.001

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Keywords:

Sputter deposition Scanning electron microscope Materials science Transmission electron microscopy Cavity magnetron Oxygen Sputtering Chemical engineering Redox Analytical Chemistry (journal) Metallurgy Chemistry Composite material Thin film Nanotechnology Organic chemistry

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced materials and composites

Physical Sciences → Engineering → Mechanical Engineering

Oxidation behavior of Ti–B–C–N coatings deposited by reactive magnetron sputtering

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