JOURNAL ARTICLE
Fabrication of diamond films by a magneto-active plasma CVD using alcohol-hydrogen system
Takuya YaraMotokazu YuasaJing ShengJun‐ichi SuzukiShigesupbu OkadaAkio Hiraki
Year: 1992 Journal: Applied Surface Science Vol: 60-61 Pages: 308-316 Publisher: Elsevier BV
Keywords:
Diamond X-ray photoelectron spectroscopy Full width at half maximum Chemical vapor deposition Scanning electron microscope Analytical Chemistry (journal) Materials science Carbon film Hydrogen Etching (microfabrication) Material properties of diamond Carbon fibers Synthetic diamond Thin film Chemistry Nanotechnology Optoelectronics Chemical engineering Composite material Layer (electronics) Organic chemistry
Metrics
10
Cited By
1.32
FWCI (Field Weighted Citation Impact)
22
Refs
0.79
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Laser-induced spectroscopy and plasma
Physical Sciences → Engineering → Mechanics of Materials
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