Error Modeling and Compensation for High-Precision Non-Contact Four Coordinate Measuring System

Abstract

The error compensation technique is used to improve the accuracy of non-contact high-precision measuring system. To ensure the accuracy of the high-precision non-contact four-coordinate blade profile measuring system, the geometric and thermal error compensation model is proposed in this paper. The system is composed of three orthogonal coordinate axes (X, Y and Z) and a rotation axis R. The coordinate transformation matrix can be calculated by the mathematical model of rigid body which is established according to the related theoretical analysis. Three-beam interferometer and standard gauge block are adopted to verify the geometric error of the system. In the thermal deformation error compensation, wavelet neural network model is established. The thermal and geometric error compensation methods are analyzed and the experimental results are given.