Time-resolved study of femtosecond laser-induced plasma on silicon

Zhandong Chen; Qiang Wu; Ming Yang; Jingjun Xu

doi:10.1364/ls.2013.lth1i.5

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Time-resolved study of femtosecond laser-induced plasma on silicon

Zhandong Chen Qiang Wu Ming Yang Jingjun Xu

Year: 2013 Pages: LTh1I.5-LTh1I.5

DOI: 10.1364/ls.2013.lth1i.5

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Abstract

Generation and evolution of femtosecond laser-induced plasma on silicon were studied in various ambient gases by steady-state and time-resolved spectroscopy. This leads to a better understanding of the laser ablation and microsturctures formation on silicon surface.

Keywords:

Femtosecond Silicon Materials science Laser Plasma Laser ablation Spectroscopy Ablation Optoelectronics Optics Ultrafast laser spectroscopy X-ray laser Laser power scaling Physics

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Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Time-resolved study of femtosecond laser-induced plasma on silicon

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