In-Situ Excimer Laser Induced Crystallization of Hydrogenated Amorphous Silicon Thin Films

N. Layadi; Pere Roca i Cabarrocas; J. Huc; J. Y. Parey; B. Drévillon

doi:10.4028/www.scientific.net/ssp.37-38.281

ScienceGate Book Chapters

JOURNAL ARTICLE

In-Situ Excimer Laser Induced Crystallization of Hydrogenated Amorphous Silicon Thin Films

N. Layadi Pere Roca i Cabarrocas J. Huc J. Y. Parey B. Drévillon

Year: 1994 Journal: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Vol: 37-38 Pages: 281-286 Publisher: Scientific.net

DOI: 10.4028/www.scientific.net/ssp.37-38.281

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science In situ Crystallization Amorphous silicon Excimer laser Silicon Amorphous solid Thin film Optoelectronics Chemical engineering Laser Nanotechnology Optics Crystallography Crystalline silicon Organic chemistry

Metrics

Cited By

2.67

FWCI (Field Weighted Citation Impact)

Refs

0.90

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

Phase-change materials and chalcogenides

Physical Sciences → Materials Science → Materials Chemistry

In-Situ Excimer Laser Induced Crystallization of Hydrogenated Amorphous Silicon Thin Films

Metrics

Citation History

Topics

Related Documents

Excimer-laser-induced crystallization of hydrogenated amorphous silicon

Excimer laser crystallization of hydrogenated amorphous silicon

Laser crystallization of compensated hydrogenated amorphous silicon thin films

Excimer Laser Induced Crystallization of Amorphous Silicon-Germanium Films

Selective Area Excimer‐Laser Crystallization of Amorphous Silicon Thin Films