Nanomechanical Switch formed by Focused-Ion-Beam Chemical Vapor Deposition

Abstract

Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology for forming a free-space-nanowiring. At 295 K the electrical resistivity of a free-space-nanowiring made using phenanthrene as the source gas was 1×10 2 Ω cm. Adding tungsten hexacarbonyl to the phenanthrene reduced the electrical resistivity to 2×10 -2 Ω cm. The nanomechanical switch composed of a coil and a nanowiring has been fabricated by using free-space-nanowiring fabrication technology, and its operation has been confirmed by applying a voltage.