Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas

Shou‐Zhe Li; Jin-Pyo Lim; Han S. Uhm

doi:10.1016/j.physleta.2006.08.036

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Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas

Shou‐Zhe Li Jin-Pyo Lim Han S. Uhm

Year: 2006 Journal: Physics Letters A Vol: 360 (2)Pages: 304-308 Publisher: Elsevier BV

DOI: 10.1016/j.physleta.2006.08.036

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Keywords:

Physics Argon Capacitively coupled plasma Plasma Atomic physics Radio frequency Atmospheric pressure Atmospheric-pressure plasma Computational physics Nuclear physics Inductively coupled plasma Meteorology Electrical engineering

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Plasma Applications and Diagnostics

Health Sciences → Medicine → Radiology, Nuclear Medicine and Imaging

Plasma Diagnostics and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electrohydrodynamics and Fluid Dynamics

Physical Sciences → Engineering → Electrical and Electronic Engineering

Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas

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