Microfabrication of Two and Three Dimensional Structures by Two-Photon Polymerization

Abstract

Femtosecond infrared laser pulses are useful for laser micro/nanofabrication of two and three dimensional (2D & 3D) structures through multiphoton process. Two-photon polymerization were used for fabricating 2D & 3D polymeric structures by several methods. These Features were produced by multibeam interference and direct writing techniques. These methods provide simple and rapid approaches for creating templates with designed 2D & 3D structure in micro/manometer scales. A new method to introduce metal oxides nanoparticles into the 3D polymeric structures also has been proposed and developed for fabricating 3D structure of polymer nanocomposites. This new method has been expecting to be applied for fabrication of functional 3D micro/nano-mechanical machines (M/NEMS) and micro/nano-devices.