Large-area epitaxial MgO buffer layers on sapphire substrates for Y-Ba-Cu-O dilm deposition

F. Wang; S. Müller; R. Wördenweber

doi:10.1016/0040-6090(93)90014-g

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Large-area epitaxial MgO buffer layers on sapphire substrates for Y-Ba-Cu-O dilm deposition

F. Wang S. Müller R. Wördenweber

Year: 1993 Journal: Thin Solid Films Vol: 232 (2)Pages: 232-236 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(93)90014-g

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Keywords:

Epitaxy Sapphire Buffer (optical fiber) Materials science Layer (electronics) Deposition (geology) Homogeneous Wafer Sputter deposition Sputtering Mineralogy Analytical Chemistry (journal) Thin film Optoelectronics Composite material Chemistry Optics Nanotechnology Geology Chromatography

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Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Physics of Superconductivity and Magnetism

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Large-area epitaxial MgO buffer layers on sapphire substrates for Y-Ba-Cu-O dilm deposition

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