Thermistor based on doped polycrystalline diamond thin films

M. Werner; V. Schlichting; Ε. Obermeier

doi:10.1016/0925-9635(92)90187-s

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Thermistor based on doped polycrystalline diamond thin films

M. Werner V. Schlichting Ε. Obermeier

Year: 1992 Journal: Diamond and Related Materials Vol: 1 (5-6)Pages: 669-672 Publisher: Elsevier BV

DOI: 10.1016/0925-9635(92)90187-s

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Keywords:

Thermistor Materials science Diamond Doping Photolithography Temperature coefficient Crystallite Polycrystalline diamond Optoelectronics Layer (electronics) Reactive-ion etching Ceramic Composite material Etching (microfabrication) Electrical engineering Metallurgy

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Electrical and Thermal Properties of Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Thermistor based on doped polycrystalline diamond thin films

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