New hybrid organic–inorganic sol–gel positive resist

JOURNAL ARTICLE

Year: 2009 Journal: Microelectronic Engineering Vol: 87 (5-8)Pages: 947-950 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2009.11.151

Keywords:

Resist Sol-gel Materials science Chemistry Nanotechnology Chemical engineering Layer (electronics)

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