JOURNAL ARTICLE

New hybrid organic–inorganic sol–gel positive resist

Keywords:
Resist Sol-gel Materials science Chemistry Nanotechnology Chemical engineering Layer (electronics)

Metrics

18
Cited By
0.78
FWCI (Field Weighted Citation Impact)
12
Refs
0.70
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Silicone and Siloxane Chemistry
Physical Sciences →  Materials Science →  Materials Chemistry
Synthesis and properties of polymers
Physical Sciences →  Materials Science →  Polymers and Plastics
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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