JOURNAL ARTICLE

Study of ZrO2–Y2O3 films prepared by rf magnetron reactive sputtering

Keywords:
Crystallite Scanning electron microscope Tetragonal crystal system Raman spectroscopy Microstructure Materials science Sputter deposition Analytical Chemistry (journal) Refractive index Spectroscopy Sputtering Cavity magnetron Thin film Optics Crystallography Chemistry Crystal structure Composite material Optoelectronics Metallurgy Nanotechnology Physics

Metrics

51
Cited By
3.43
FWCI (Field Weighted Citation Impact)
22
Refs
0.93
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
High-Temperature Coating Behaviors
Physical Sciences →  Engineering →  Aerospace Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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