Transparent conductive Ga2O3/Cu/ITO multilayer films prepared on flexible substrates at room temperature

Huihui Zhuang; Jinliang Yan; Chengyang Xu; Delan Meng

doi:10.1016/j.apsusc.2014.04.020

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Transparent conductive Ga2O3/Cu/ITO multilayer films prepared on flexible substrates at room temperature

Huihui Zhuang Jinliang Yan Chengyang Xu Delan Meng

Year: 2014 Journal: Applied Surface Science Vol: 307 Pages: 241-245 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2014.04.020

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Keywords:

Materials science Sheet resistance Figure of merit Polyethylene terephthalate Layer (electronics) Sputter deposition Sputtering Optoelectronics Electrical conductor Electrical resistivity and conductivity Composite material Thin film Nanotechnology Electrical engineering

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Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Transparent conductive Ga2O3/Cu/ITO multilayer films prepared on flexible substrates at room temperature

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