Effect of internal stress of CNx coating on its wear in sliding friction

Kazumi Kato; M. Bai; Noritsugu Umehara; Y. Miyake

doi:10.1016/s0257-8972(99)00006-7

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Effect of internal stress of CNx coating on its wear in sliding friction

Kazumi Kato M. Bai Noritsugu Umehara Y. Miyake

Year: 1999 Journal: Surface and Coatings Technology Vol: 113 (3)Pages: 233-241 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(99)00006-7

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Keywords:

Materials science Contact mechanics Composite material Coating Radius of curvature Silicon nitride Ion beam-assisted deposition Substrate (aquarium) Stress (linguistics) RADIUS Diamond-like carbon Nitride Curvature Thin film Layer (electronics) Ion beam Beam (structure) Nanotechnology Optics Structural engineering

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Effect of internal stress of CNx coating on its wear in sliding friction

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