JOURNAL ARTICLE

Radio-frequency sputtered indium tin oxide thin films

Michael A. RussakJerome De Carlo

Year: 1983 Journal:   Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Vol: 1 (3)Pages: 1563-1564   Publisher: American Institute of Physics

Abstract

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Michael Russak, Jerome De Carlo; Radio‐frequency sputtered indium tin oxide thin films. J. Vac. Sci. Technol. A 1 July 1983; 1 (3): 1563–1564. https://doi.org/10.1116/1.572263 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search

Keywords:
Indium tin oxide Materials science Indium Tin Thin film Metallurgy Optoelectronics Nanotechnology

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0
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0.66
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Citation History

Topics

Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Transition Metal Oxide Nanomaterials
Physical Sciences →  Materials Science →  Polymers and Plastics
ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry

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